Integrated silicon optofluidic ring resonator
نویسندگان
چکیده
منابع مشابه
Microfabricated optofluidic ring resonator structures.
We describe the fabrication and preliminary optical characterization of rugged, Si-micromachined optofluidic ring resonator (μOFRR) structures consisting of thin-walled SiO(x) cylinders with expanded midsections designed to enhance the three-dimensional confinement of whispering gallery modes (WGMs). These μOFRR structures were grown thermally at wafer scale on the interior of Si molds defined ...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2010
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.3496027